FIB 201: General FIB Usage
With Emphasis on Device Modification and Electrical Analysis
- Description
- This course is designed for beginning FIB users whose applications
mainly involve design, debug, and electrical analysis on VLSI devices.
It will familiarize students with the practical setup and usage of FIB
systems with emphasis on microsurgery and electrical analysis, including
column alignment, beam current calibration, end-point, secondary ion
versus secondary electron imaging, accessing spare gates, CAD processing
and usage, and etc. An overview of the FIB systems and basic theories
will also be included.
- Prerequisites
- No prior knowledge of focused ion systems is required. Students
should be somewhat familiar with the fundamentals of compute usage,
basic UNIX, and basic silicon design terminologies and
technologies.
- Goals
- Upon completion of this course, students will be able to:
- Describe the basic function theory behind FIB operations;
- Describe the major applications of FIB systems in the electronic
industry;
- Understand the limitation of FIB systems;
- Prepare FIB systems for use;
- Operate FIB tools to perform general milling and deposition
functions;
- Perform beam/aperture alignment;
- Plan and perform complex device modification.
- Duration
- 5 days (30% lecture, 70% lab)
FIB 202: General FIB Usage
With Emphasis on Micro-machining
- Description
- This course is designed for beginning FIB users whose applications
mainly involve micro-machining capabilities. It will familiarize
students with the practical setup and usage of FIB systems with emphasis
on micro-machining technologies, including column alignment, beam
current calibration, X-section, TEM sample preparation, secondary ion
versus secondary electron imaging, and etc. An overview of the FIB
systems and basic theories will also be included.
- Prerequisites
- No prior knowledge of focused ion systems is required. Students
should be somewhat familiar with the fundamentals of compute usage,
basic UNIX, and basic silicon design terminologies and
technologies.
- Goals
- Upon completion of this course, students will be able to:
- Describe the basic function theory behind FIB operations;
- Describe the major applications of FIB systems in the electronic
industry;
- Describe how FIB systems is used to support other
equipment;
- Understand the limitation of FIB systems;
- Prepare FIB systems for use;
- Perform beam/aperture alignment;
- Prepare cross sections and TEM samples.
- Duration
- 5 days (30% lecture, 70% lab)
