FIB 301: Advanced FIB Usage
With Emphasis on Device Modification and Electrical Analysis
- Description
- This course is designed for people who already have a basic
understanding of FIB operations. It will focus on advanced microsurgery
design, and discuss in detail on how to optimize the performance of FIB
systems for microsurgery, including system calibration, surgery design
optimization, high aspect ratio via drill, different usage of halogen
assisted mill process, device reconstruction, insulation deposition and
its applications, and etc.
- Prerequisites
- A basic understanding of FIB operation and its applications is
required. At least 6 months of experiences with FIB systems or taking
one of our FIB general user courses is recommended before attending this
course.
- Goals
- Upon completion of this course, students will be able to:
- Describe the advantages and disadvantages of different types FIB
systems from different manufactures;
- Perform complete calibration of a FIB system;
- Optimize the design of a microsurgery to increase success
yield;
- Optimize the performance of a FIB system for a particular
application.
- Duration
- 2 days (10% lecture, 90% lab)
FIB 302: General FIB Usage
With Emphasis on Micro-machining
- Description
- This course is designed for people who already have a basic
understanding of FIB operations. It will focus on advanced
micro-machining techniques, and discuss in detail on how to optimize the
performance of FIB systems for micro-machining applications, including
system calibration, cross section decoration with halogen gas, TEM
sample preparation techniques, improving the flatness of the cross
section, and etc.
- Prerequisites
- A basic understanding of FIB operation and its applications is
required. At least 6 months of experiences with FIB systems or taking
one of our FIB general user courses is recommended before attending this
course.
- Goals
- Upon completion of this course, students will be able to:
- Describe the advantages and disadvantages of different types FIB
systems from different manufactures;
- Perform complete calibration of a FIB system;
- Optimize the performance of a FIB system for a particular
application;
- Prepare better cross section and TEM samples.
- Duration
- 2 days (10% lecture, 90% lab)
